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Controlled generation of pulse-modulated RF plasmas for materials processing

✍ Scribed by Ye, Rubin; Ishigaki, Takamasa; Sakuta, Tadahiro

Book ID: 121441185
Publisher: Institute of Physics
Year: 2005
Tongue: English
Weight: 689 KB
Volume: 14
Category: Article
ISSN: 0963-0252
DOI: 10.1088/0963-0252/14/2/022

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