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Controlled fabrication of Mo-seeded Si microcones by Ar+-ion bombardment

✍ Scribed by Masaki Tanemura; H. Yamauchi; Y. Yamane; T. Okita; S. Tanemura


Book ID
113822568
Publisher
Elsevier Science
Year
2004
Tongue
English
Weight
435 KB
Volume
215
Category
Article
ISSN
0168-583X

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