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TOF-ICISS study of surface damage formed by Ar ion bombardment on Si(100)

✍ Scribed by Koji Sumitomo; Ken-ichiroTanaka; Itsuo Katayama; Fumiya Shoji; Kenjiro Oura


Book ID
118364111
Publisher
Elsevier Science
Year
1991
Tongue
English
Weight
445 KB
Volume
242
Category
Article
ISSN
0039-6028

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