Damage profiling of Ar+ sputtered Si(100) surface by medium energy ion scattering spectroscopy

✍ Scribed by J.C. Lee; C.S. Jeong; H.J. Kang; H.K. Kim; D.W. Moon

• Publisher: Elsevier Science
• Year: 1996
• Tongue: English
• Weight: 400 KB
• Volume: 100-101
• Category: Article
• ISSN: 0169-4332
• DOI: 10.1016/0169-4332(96)00264-4