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Control of the etching reaction of digital etching using tunable UV laser irradation

✍ Scribed by T. Meguro; M. Ishii; T. Sugano; K. Gamo; Y. Aoyagi

Publisher: Elsevier Science
Year: 1994
Tongue: English
Weight: 557 KB
Volume: 82-83
Category: Article
ISSN: 0169-4332
DOI: 10.1016/0169-4332(94)90216-x

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