✦ LIBER ✦
Reaction mechanisms for the photon-enhanced etching of semiconductors: An investigation of the UV-stimulated interaction of chlorine with Si(100)
✍ Scribed by R.B. Jackman; H. Ebert; J.S. Foord
- Publisher
- Elsevier Science
- Year
- 1986
- Weight
- 56 KB
- Volume
- 176
- Category
- Article
- ISSN
- 0167-2584
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