✦ LIBER ✦

Control of surface charging during high current ion implantation

✍ Scribed by M.I. Current; A. Bhattacharyya; M. Khid

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Surface charge control during high-curre

✍ Michael I Current; Wes Lukaszek; Michael C Vella; Nicholas H Tripsas 📂 Article 📅 1995 🏛 Elsevier Science 🌐 English ⚖ 616 KB

A study of wafer and device charging dur

✍ Vijay K. Basra; Charles M. McKenna; Susan B. Felch 📂 Article 📅 1987 🏛 Elsevier Science 🌐 English ⚖ 550 KB

Charging Phenomena During Medium Current

✍ Shibata, S.; Kamiyanagi, H.; Kawase, F.; Kaneki, R.; Kawashima, T.; Kitamura, A. 📂 Article 📅 2011 🏛 IEEE 🌐 English ⚖ 796 KB

Device dependence of charging effects fr

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✍ Daniel F. Downey; Reuel B. Liebert 📂 Article 📅 1991 🏛 Elsevier Science 🌐 English ⚖ 616 KB

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✍ Gordon Angel; Nara Meyyappan; Frank Sinclair; Weilin Tu 📂 Article 📅 1991 🏛 Elsevier Science 🌐 English ⚖ 452 KB