Charging Phenomena During Medium Current Ion Implantation of Carbonized Photo-Resist Surface Layers

✍ Scribed by Shibata, S.; Kamiyanagi, H.; Kawase, F.; Kaneki, R.; Kawashima, T.; Kitamura, A.

• Book ID: 114669503
• Publisher: IEEE
• Year: 2011
• Tongue: English
• Weight: 796 KB
• Volume: 24
• Category: Article
• ISSN: 0894-6507
• DOI: 10.1109/tsm.2011.2128352