Surface charge control during high-current ion implantation: characterization with CHARM-2 sensors

✍ Scribed by Michael I Current; Wes Lukaszek; Michael C Vella; Nicholas H Tripsas

• Book ID: 113284884
• Publisher: Elsevier Science
• Year: 1995
• Tongue: English
• Weight: 616 KB
• Volume: 96
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/0168-583x(94)00449-8