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Control of Si1−xGex growth from the gas phase I. The effect of the layer source gases

✍ Scribed by H. Kühne; H. Richter

Publisher: Elsevier Science
Year: 1993
Tongue: English
Weight: 514 KB
Volume: 129
Category: Article
ISSN: 0022-0248
DOI: 10.1016/0022-0248(93)90463-7

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