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Control of plasma parameters and electric fields in a microwave-rf hybrid plasma

โœ Scribed by Fujita, Hiroharu; Okuno, Yoshihiro; Ohtsu, Yasunori; Yagura, Shinya


Book ID
121381465
Publisher
American Institute of Physics
Year
1990
Tongue
English
Weight
608 KB
Volume
67
Category
Article
ISSN
0021-8979

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