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Control of oxygen in undoped liquid encapsulation Czochralski GaAs

✍ Scribed by M. Müller; G. Gärtner; G. Hirt; M. Jurisch; A. Köhler; G. Müller; B. Weinert


Publisher
Elsevier Science
Year
1996
Tongue
English
Weight
348 KB
Volume
166
Category
Article
ISSN
0022-0248

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Modeling analysis of liquid encapsulated
✍ E. V. Yakovlev; V. V. Kalaev; E. N. Bystrova; O. V. Smirnova; Yu. N. Makarov; Ch 📂 Article 📅 2003 🏛 John Wiley and Sons 🌐 English ⚖ 1012 KB

## Abstract The results of three‐dimensional unsteady modeling of melt turbulent convection with prediction of the crystallization front geometry in liquid encapsulated Czochralski growth of InP bulk crystals and vapor pressure controlled Czochralski growth of GaAs bulk crystals are presented. The