Beam-assisted-etching technique for fabr
β
J. Taniguchi; J. Yokoyama; M. Komuro; H. Hiroshima; I. Miyamoto
π
Article
π
2000
π
Elsevier Science
π
English
β 773 KB
We fabricated a single crystal diamond field emitter tip using focused ion beam assisted etching and investigated characteristics of electron emission from single crystal diamond. Electron emission from single crystal diamond is field emission. FIB assisted etching is very useful to reduce emission