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Control of crystal orientation in YBCO thin films by an oxygen diffusion process

โœ Scribed by Uchiyama, T; Iguchi, I


Book ID
120213951
Publisher
Institute of Physics
Year
2004
Tongue
English
Weight
105 KB
Volume
17
Category
Article
ISSN
0953-2048

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YBCO films with c-axis orientation have been grown epitaxially on (001) NdGaO3 substrates with off-axis DC magnetron sputtering. The oxygen out diffusion at room temperature of strip lines etched by an argon ion beam in the a-and b-direction has been studied. A decrease of the DC resistivity ratio P

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We studied the behavior of the oxygen in the YBa2Cu3Ox films using ~aO as a tracer. Pure ~eO2 gas was โ€ข !ntroduced "into a chamber during" depos~ion: Then it was. changed,efor 1602 gas in the subsequent cool-=ng oown process, t nough YBCO films aosolutely contained only O atoms in their oxygen sites