Observation of oxygen in YBCO thin films during the cooling down process using 18O tracer
✍ Scribed by K. Tsuda; T. Suzuki; T. Matsui; H. Kimura; M. Nagano; K. Mukae
- Book ID
- 103944441
- Publisher
- Elsevier Science
- Year
- 1991
- Tongue
- English
- Weight
- 265 KB
- Volume
- 185-189
- Category
- Article
- ISSN
- 0921-4534
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✦ Synopsis
We studied the behavior of the oxygen in the YBa2Cu3Ox films using ~aO as a tracer. Pure ~eO2 gas was • !ntroduced "into a chamber during" depos~ion: Then it was. changed,efor 1602 gas in the subsequent cool-=ng oown process, t nough YBCO films aosolutely contained only O atoms in their oxygen sites during growth orocess, almost all leO atoms were replaced with ~sO atoms while the films were cooled down; 95% of ~80 atoms were substituted using if-plasma, and 85% of ~eO atoms without the plasma. It shows that rf-plasma strongly affected the oxygenation of the YBCO films even in the cooling process.