Design and performance of an excimer-las
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K.-H. Gerlach; J. Jersch; K. Dickmann; L.J. Hildenhagen
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Article
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1998
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Elsevier Science
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English
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We report on the design of an excimer-laser based system for high precision micromachining of spinnerets using a mask imaging technique. Both the illumination and imaging unit are optimized for specified demagnification ratios of 5 and 15, respectively. Detailed investigations were performed to meas