✦ LIBER ✦

Contents: Laser Phys. Lett. 6/2011

Publisher: John Wiley and Sons
Year: 2011
Tongue: English
Weight: 253 KB
Volume: 8
Category: Article
ISSN: 1612-2011
DOI: 10.1002/lapl.201190013

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✦ Synopsis

In order to analyze the effect of milling parameters on the sub-μm grating structures, the technique for creating cross-sections of the milled structures was optimized. The cross-sectioning was done in situ using the same FIB machine that produced the grating structure. The optimized method started with local FIB-induced deposition of a Pt layer on top of the region of interest in order to prevent redeposition when milling the crosssection and to provide a contrast for scanning electron microscopy (SEM) imaging. The next step involved milling a large-area hole with a sloped angle to avoid long milling times. Finally, a line-by-line scan (termed cleaning cross-section) was applied at a lower current (typically 28 pA) to facilitate a high contrast image, as depicted in Cover Picture. Analysis of the crosssectional profile of the grating structures was performed by use of SEM available in the same machine. (Cover picture:

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