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Contactless method for studying the parameters of the electrode region of an RF discharge

โœ Scribed by A. F. Aleksandrov; V. A. Ryaby; V. P. Savinov; V. G. Yakunin


Book ID
110133076
Publisher
SP MAIK Nauka/Interperiodica
Year
2002
Tongue
English
Weight
94 KB
Volume
28
Category
Article
ISSN
1063-780X

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