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Contact barrier application of selective CVD-tungsten in a bipolar device

✍ Scribed by H. Körner; E. Bertagnolli; I. Maier

Book ID: 103615381
Publisher: Elsevier Science
Year: 1989
Tongue: English
Weight: 622 KB
Volume: 38
Category: Article
ISSN: 0169-4332
DOI: 10.1016/0169-4332(89)90571-0

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