✦ LIBER ✦
Application of selective CVD tungsten for low contact resistance via filling to aluminum multilayer interconnection
✍ Scribed by S. Rang; R. Chow; R. H. Wilson; B. Gorowitz; A. G. Williams
- Book ID
- 112812315
- Publisher
- Springer US
- Year
- 1988
- Tongue
- English
- Weight
- 597 KB
- Volume
- 17
- Category
- Article
- ISSN
- 0361-5235
No coin nor oath required. For personal study only.