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Computer simulation of channeling implantation at high and medium energies

✍ Scribed by M. Posselt


Book ID
113284616
Publisher
Elsevier Science
Year
1993
Tongue
English
Weight
307 KB
Volume
80-81
Category
Article
ISSN
0168-583X

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Dynamic computer simulation of high ener
✍ Wolfhard MΓΆller πŸ“‚ Article πŸ“… 1989 πŸ› Elsevier Science 🌐 English βš– 407 KB

For the simulation of high ener~', high fluence implantations, dynamic codes are necessary which take into account the mod!fication of the substance due to the presence of the implants" and due to collisional effects. In the present paper, we give a brief description of such a binapy collision simul