Computational Study of the Gas Phase Reactions of Isopropylimido and Allylimido Tungsten Precursors for Chemical Vapor Deposition of Tungsten Carbonitride Films: Implications for the Choice of Carrier Gas

✍ Scribed by Won, Yong Sun; Kim, Young Seok; Anderson, Timothy J.; McElwee-White, Lisa

• Book ID: 127151140
• Publisher: American Chemical Society
• Year: 2008
• Tongue: English
• Weight: 535 KB
• Volume: 20
• Category: Article
• ISSN: 0897-4756
• DOI: 10.1021/cm802173e