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Computational simulations on electron orbits in the magnetron sputtering plasmas

✍ Scribed by Shunji Ido; Kosuke Nakamura

Publisher: Elsevier Science
Year: 1996
Tongue: English
Weight: 386 KB
Volume: 47
Category: Article
ISSN: 0042-207X
DOI: 10.1016/0042-207x(96)00119-4

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