✦ LIBER ✦
Plasma analysis based on newly found similarities in the relative populations of excited states produced by sputtering and by electron impact: Roger Kelly et al, J Vac Sci Technol, 21 (3), 1982, 774–777
- Publisher
- Elsevier Science
- Year
- 1985
- Tongue
- English
- Weight
- 144 KB
- Volume
- 35
- Category
- Article
- ISSN
- 0042-207X
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