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Comprehensive synchrotron grazing-incidence X-ray scattering analysis of nanostructures in porous polymethylsilsesquioxane dielectric thin films

✍ Scribed by Rho, Yecheol; Ahn, Byungcheol; Yoon, Jinhwan; Ree, Moonhor

Book ID: 119973125
Publisher: International Union of Crystallography
Year: 2013
Tongue: English
Weight: 982 KB
Volume: 46
Category: Article
ISSN: 0021-8898
DOI: 10.1107/S0021889812050923

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