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In-Situ Grazing Incidence Small-Angle X-ray Scattering Studies on Nanopore Evolution in Low- k Organosilicate Dielectric Thin Films

✍ Scribed by Lee, Byeongdu; Yoon, Jinhwan; Oh, Weontae; Hwang, Yongtaek; Heo, Kyuyoung; Jin, Kyeong Sik; Kim, Jehan; Kim, Kwang-Woo; Ree, Moonhor

Book ID: 121864282
Publisher: American Chemical Society
Year: 2005
Tongue: English
Weight: 492 KB
Volume: 38
Category: Article
ISSN: 0024-9297
DOI: 10.1021/ma048214e

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