✦ LIBER ✦
Structural study of nanoporous ultra low-k dielectrics using complementary techniques: Ellipsometric porosimetry, X-ray reflectivity and grazing incidence small-angle X-ray scattering
✍ Scribed by V. Jousseaume; G. Rolland; D. Babonneau; J.-P. Simon
- Book ID
- 108060309
- Publisher
- Elsevier Science
- Year
- 2007
- Tongue
- English
- Weight
- 515 KB
- Volume
- 254
- Category
- Article
- ISSN
- 0169-4332
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