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Compositional transients in MOCVD grown III–V heterostructures

✍ Scribed by E.J. Thrush; J.E.A. Whiteaway; G. Wale-Evans; D.R. Wight; A.G. Cullis


Publisher
Elsevier Science
Year
1984
Tongue
English
Weight
716 KB
Volume
68
Category
Article
ISSN
0022-0248

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## Abstract Nonuniform indium distribution within InGaN/GaN single quantum well (SQW) structures with nanoscale islands grown by metalorganic chemical vapor deposition (MOCVD) have been characterized by advanced characterization techniques. Robinson backscattered electron (BSE) measurements show cl