๐”– Bobbio Scriptorium
โœฆ   LIBER   โœฆ

Compositional analysis of semiconductor thin films using electroanalytical techniques

โœ Scribed by G.Seetha Rama Rao; S.Jayarama Reddy


Publisher
Elsevier Science
Year
1984
Tongue
English
Weight
437 KB
Volume
120
Category
Article
ISSN
0040-6090

No coin nor oath required. For personal study only.


๐Ÿ“œ SIMILAR VOLUMES


Compositional analysis of HfxSiyO1โˆ’xโˆ’y t
โœ H. Kitano; S. Abo; M. Mizutani; J. Tsuchimoto; T. Lohner; J. Gyulai; F. Wakaya; ๐Ÿ“‚ Article ๐Ÿ“… 2006 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 377 KB

Hf x Si y O 1ร€xร€y layers with thicknesses of 2 and 10 nm were measured by medium energy ion scattering (MEIS) with a toroidal electrostatic analyzer (TEA), in which the yield of MEIS spectra was found to decrease with decreasing energy in contrast to conventional Rutherford backscattering spectromet