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Compositional Analysis and Capacitance-Voltage Properties of TiO[sub 2] Films by Low Pressure Metal-Organic Chemical Vapor Deposition

✍ Scribed by Won, Tae-Kyung

Book ID: 125460144
Publisher: The Electrochemical Society
Year: 1992
Tongue: English
Weight: 411 KB
Volume: 139
Category: Article
ISSN: 0013-4651
DOI: 10.1149/1.2069068

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