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Composition and structure of vapour-deposited cryolite films

✍ Scribed by H.K. Pulker; Ch. Zaminer

Publisher: Elsevier Science
Year: 1970
Tongue: English
Weight: 526 KB
Volume: 5
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(70)90113-6

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## Abstract The paper reports the results of a structural investigation of C.V.D. tantalum, which had been deposited on a silica substrate. Deposits at 1000°C were high impurity powders or flakes, at 1100°C (normal deposition temperature) foil‐like, these containing much lower silicon contents, bei