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Composition and structure of titanium carbonitride thin film synthesized by ion implantation

✍ Scribed by M. Guemmaz; A. Mosser; J.J. Grob; J.C. Sens; R. Stuck


Publisher
Elsevier Science
Year
1996
Tongue
English
Weight
374 KB
Volume
80
Category
Article
ISSN
0257-8972

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