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Structure of thin films prepared by the cosputtering of titanium and aluminium or titanium and silicon

✍ Scribed by G. Beensh-Marchwicka; L. Kròl-Stȩpniewska; W. Posadowski


Publisher
Elsevier Science
Year
1981
Tongue
English
Weight
414 KB
Volume
82
Category
Article
ISSN
0040-6090

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