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Composition and Mechanical Properties of rf-Sputtered Amorphous Silicon Carbide Coating

✍ Scribed by Jung-Sheng Huang; Matthew Ohland; Wendell S. Williams


Book ID
110825971
Publisher
John Wiley and Sons
Year
1992
Tongue
English
Weight
367 KB
Volume
75
Category
Article
ISSN
0002-7820

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