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Composition and crystal structure of N doped TiO2 film deposited at different O2 flow rate by direct current sputtering

✍ Scribed by Wanyu Ding; Dongying Ju; Weiping Chai

Book ID: 114337018
Publisher: IOS Press
Year: 2011
Tongue: English
Weight: 158 KB
Volume: 23
Category: Article
ISSN: 1878-7320
DOI: 10.1016/s1001-0742(11)61091-7

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