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Composite Si/PS membrane pressure sensors with micro and macro-porous silicon

✍ Scribed by L. Sujatha; Enakshi Bhattacharya

Book ID: 107590169
Publisher: Indian Academy of Sciences
Year: 2009
Tongue: English
Weight: 498 KB
Volume: 34
Category: Article
ISSN: 0256-2499
DOI: 10.1007/s12046-009-0028-7

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