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[IEEE 2007 International Workshop on Physics of Semiconductor Devices - Mumbai, India (2007.12.16-2007.12.20)] 2007 International Workshop on Physics of Semiconductor Devices - Sensitivity and stress in pressure sensors with composite silicon/macroporous silicon membranes

✍ Scribed by Sujatha, L.; Bhattacharya, Enakshi

Book ID: 118253253
Publisher: IEEE
Year: 2007
Weight: 296 KB
Volume: 0
Category: Article
ISBN: 1424417287
DOI: 10.1109/iwpsd.2007.4472626

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