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Complementary metal-oxide semiconductor-compatible silicon carbide pressure sensors based on bulk micromachining

✍ Scribed by Wei Tang; Baixiang Zheng; Lei Liu; Zhe Chen; Haixia Zhang

Book ID: 114461573
Publisher: The Institution of Engineering and Technology
Year: 2011
Tongue: English
Weight: 318 KB
Volume: 6
Category: Article
ISSN: 1750-0443
DOI: 10.1049/mnl.2011.0084

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