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Comparison of the thermal stability of the codeposited carbon/hydrogen layer to that of the saturated implant layer

✍ Scribed by R.A. Causey; W.R. Wampler; D. Walsh


Publisher
Elsevier Science
Year
1990
Tongue
English
Weight
446 KB
Volume
176-177
Category
Article
ISSN
0022-3115

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