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Comparison of optical emission spectrometric measurements of the concentration and energy of species in low-pressure microwave and radiofrequency plasma sources

✍ Scribed by R�pcke, J�rgen; Ohl, Andreas; Schmidt, Martin

Book ID: 125520295
Publisher: Royal Society of Chemistry
Year: 1993
Tongue: English
Weight: 824 KB
Volume: 8
Category: Article
ISSN: 0267-9477
DOI: 10.1039/JA9930800803

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