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Comparison of microwave and lower frequency discharges for plasma polymerization

✍ Scribed by Claude, R.; Moisan, M.; Wertheimer, M. R.; Zakrzewski, Z.


Book ID
121381467
Publisher
American Institute of Physics
Year
1987
Tongue
English
Weight
562 KB
Volume
50
Category
Article
ISSN
0003-6951

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