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Comparison of dry etching techniques for InGaP, AlInP and AlGaP

✍ Scribed by J. Hong; J.W. Lee; C.J. Santana; C.R. Abernathy; E.S. Lambers; S.J. Pearton; W.S. Hobson; F. Ren

Publisher: Elsevier Science
Year: 1996
Tongue: English
Weight: 282 KB
Volume: 39
Category: Article
ISSN: 0038-1101
DOI: 10.1016/0038-1101(95)00422-x

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