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Comparison of BC and MD simulations of low-energy ion implantation

✍ Scribed by M. Posselt; K.-H. Heinig

Book ID: 113287666
Publisher: Elsevier Science
Year: 1995
Tongue: English
Weight: 439 KB
Volume: 102
Category: Article
ISSN: 0168-583X
DOI: 10.1016/0168-583x(95)80148-f

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