✦ LIBER ✦
Comparison of Dynamic Simulations with RBS Measurements of Low Energy Ion Implantation of Sb + into SiO 2 /Si Substrates
✍ Scribed by Ignatova, Velislava A. ;W�tjen, Vwe ;Katardjiev, Illia V. ;Chakarov, Ivan R.
- Book ID
- 106196305
- Publisher
- Springer-Verlag
- Year
- 2004
- Weight
- 454 KB
- Volume
- 145
- Category
- Article
- ISSN
- 0344-838X
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