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Comparison of backscattering spectrometry and secondary ion mass spectrometry by analysis of tantalum pentoxide layers

✍ Scribed by Chu, W. K.; Nicolet, M. A.; Mayer, J. W.; Evans, C. A.


Book ID
126838457
Publisher
American Chemical Society
Year
1974
Tongue
English
Weight
698 KB
Volume
46
Category
Article
ISSN
0003-2700

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