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Comparative study of polysilicon-on-oxide using spectroscopic ellipsometry, atomic force microscopy, and transmission electron microscopy

✍ Scribed by P. Petrik; M. Fried; T. Lohner; R. Berger; L.P. Bı́ró; C. Schneider; J. Gyulai; H. Ryssel

Book ID: 114086321
Publisher: Elsevier Science
Year: 1998
Tongue: English
Weight: 207 KB
Volume: 313-314
Category: Article
ISSN: 0040-6090
DOI: 10.1016/s0040-6090(97)00829-8

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