Comments on the influence of the entrance zone in LPCVD reactors for in situ phosphoros-doped polysilicon deposition

✍ Scribed by C. Azzaro; P. Duverneuil; J.P. Couderc

• Publisher: Elsevier Science
• Year: 1993
• Tongue: English
• Weight: 581 KB
• Volume: 48
• Category: Article
• ISSN: 0009-2509
• DOI: 10.1016/0009-2509(93)80363-u

✦ Synopsis

constant in eq. (15), dimensionless profile assumption in adsorption studies. A.I.Ch.E. J. 32, radial distance from center of particle, m 149-154. radius of particle, m Glueckauf, E., 1955, Theory of chromatography 10: formulae time, s for diffusion into spheres and their application to dimensionless concentration (C/C,) chromatography. Trans. Faraday Sot. 51, 1540-1551. dimensionless bulk concentration ( = 1) Goto, M. and Hirose, T., 1991, Modified parabolic profile volume-averaged dimensionless concentration approximation of intraparticle concentration for catalytic constant in eq. (15), dimensionless chemical reaction and adsorption. J. Chem. Engng Japan 24, 538-542. Greek letters : dimensionless time (Dt/rg) dimensionless radial distance (r/rs) & Thiele modulus [(ro/3)(k/D)1'z] w function in eq. (14), dimensionless