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Combined evaluation of grazing incidence X-ray fluorescence and X-ray reflectivity data for improved profiling of ultra-shallow depth distributions

✍ Scribed by Ingerle, D.; Meirer, F.; Pepponi, G.; Demenev, E.; Giubertoni, D.; Wobrauschek, P.; Streli, C.


Book ID
125826030
Publisher
Elsevier Science
Year
2014
Tongue
English
Weight
889 KB
Volume
99
Category
Article
ISSN
0584-8547

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