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Combined evaluation of grazing incidence X-ray fluorescence and X-ray reflectivity data for improved profiling of ultra-shallow depth distributions

✍ Scribed by Ingerle, D.; Meirer, F.; Pepponi, G.; Demenev, E.; Giubertoni, D.; Wobrauschek, P.; Streli, C.

Book ID: 125826030
Publisher: Elsevier Science
Year: 2014
Tongue: English
Weight: 889 KB
Volume: 99
Category: Article
ISSN: 0584-8547
DOI: 10.1016/j.sab.2014.06.019

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