✦ LIBER ✦

Combination of a focused ion beam system and a scanning electron microscope for in situ observation of ion beam effects

✍ Scribed by L. Vijgen; E.J.M. v. Welsy

Publisher: Elsevier Science
Year: 1989
Tongue: English
Weight: 94 KB
Volume: 31
Category: Article
ISSN: 0304-3991
DOI: 10.1016/0304-3991(89)90420-8

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