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CO2 laser induced CVD of TiN

✍ Scribed by O. Conde; M.L.G. Ferreira; P. Hochholdinger; A.J. Silvestre; R. Vilar

Publisher
Elsevier Science
Year
1992
Tongue
English
Weight
358 KB
Volume
54
Category
Article
ISSN
0169-4332

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